LayTec Gesellschaft für in-situ und Nanotechnologie mbH
LayTec is the leader in the field of in situ monitoring systems for MOCVD, MBE and other thin-film processes. Our real-time sensors are in use both in R&D and mass production.
Our tools measure epitaxy growth properties like growth rate, layer thickness, doping levels, ternary material composition, surface roughness, wafer surface temperature (True Temperature) and wafer bowing with an extreme precision already during the deposition process!
Our brand-new sensor EpiCurve® TT allows simultaneous and wafer-selective temperature, reflectance and wafer bowing measurements with an outstanding resolution up to 0.3 km-1. EpiTT sensor is the first choice today for GaN LED production world-wide and provides emissivity corrected temperature measurements based on the combination of pyrometry and reflectance measurements at two optimized wavelengths. EpiRAS® TT is the most advanced multi-wafer in situ sensor today. It is a unique tool for the R&D of new GaAs- and InP-based opto-electronic devices. Our sensors are based on four measurement techniques: emissivity corrected pyrometry, normalized reflectance spectroscopy, reflectance anisotropy spectroscopy (RAS) and laser deflection measurements.
The enhanced knowledge of the epitaxy growth process achieved through in situ monitoring dramatically reduces development cycles and enables superior methods of quality control.