SUSS MicroTec
SUSS MicroTec is a world leading supplier of precision technology providing innovative solutions
for markets including Nanotechnology, MEMS, Advanced Packaging, Compound Semiconductor,
Silicon-On-Insulator and 3D Interconnect. The company manufactures a complete
line of nano imprinting systems, photoresist and dielectric coat/bake/develop systems, microlithography
exposure systems, wafer bonders and probers.
SUSS MicroTec equipment supports novel, cost-effective Micro/Nano-Replication technologies,
such as nanoimprinting with thermal and UV, single imprint and step and repeat (SSIL = step
and stamp imprint lithography).
SUSS MicroTec is offering three nanotechnology applications: UV-Nanoimprint Lithography
(UV-NIL), Substrate Conformal Imprint Lithography (SCIL) and SMILE, a Microlens Imprint
Lithography Technique.
