Skip to content

DREEBIT GmbH

Our business focus is development, fabrication, sales and distribution, and service of vacuum equipment and components, and facilities for micro- and nanotechnology based on ion and electron beam techniques. We organize commission and deliver services for equipment, instruments, and components for vacuum technology.

 The patented technology of DREEBITs source for highly charged ions (HCI) opens up a wide range of applications:

Nanostructures

Single ion hits create structures on the surface on a nanoscale the dimensions of which are found to depend on the charge and kinetic energy of the projectile but also on the conducting properties of the surface.
The high emission yield of secondary particles provides the basis for improvements and new techniques of surface modification and analysis, such as TOF-SIMS using highly charged ions. 

Noble Gas Focused Ion Beam

There is a graet demand for beams of noble gases in Focused Ion Beam (FIB) technology with applications in material science and semiconductor industry.
The Dresden EBIT has been employed at the NanoFIB machine at LPN/CNRS in Marcoussis, France.
It not only meets the requirements, such as a small ion beam emittance and reliability, but is also simple to implement and to operate. 

DREEBIT Ion sources are also used for:

- Time of Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

- Medical cancer therapy (particle therapy, proton, carbon ion therapy)