Aurion Anlagentechnik GmbH
Aurion delivers systems for treatment and coating of surfaces by means of plasma processes as well as radio frequency components. Plasma technologies employed are:
l Cleaning and activation with RIE (Reactive Ion Etching) and Microwave downstream plasma
l Coating with PVD (Physical Vapour Deposition, Sputtering) and PECVD (Plasma Enhanced Chemical Vapour Deposition)
l Activation with atmospheric plasma
Apart from systems and components Aurion offers its expertise in the area of plasma and radio frequency technology for consulting services and training. While providing a series of standard systems for surface treatment, Aurion also develops and builds custom made systems, i.e. solutions which are tailored to the specific requirements of the customer.
Aurion´s plasma systems are used in Semiconductor, Medical technology, Optics, Automotive and other industrial areas.