Peter Wolters AG
Since 1804, PETER WOLTERS, a subsidiary of Novellus Systems Incorporated, has become a worldwide technology and innovation leader in Finishing by delivering solutions of outstanding technical performance, which provide manufacturers with a competitive advantage. For more than 60 years PETER WOLTERS has been developing machine tools for high precision lapping, polishing and fine-grinding of flat work pieces. The machines of the PETER WOLTERS AG are in service worldwide with well known companies in the semiconductor, electronic, metal, ceramic and glass industries. They are used wherever work pieces demand the highest quality of surface finish, parallelism, flatness and accuracy at an economical cost. With the acquisition of Voumard Machines Co. S.A., Switzerland, Peter Wolters added a series of industry-leading machine tools to the portfolio and broadens the company’s product range by adding solutions for ID/OD grinding applications. HFP (Haze-Free Polishing) is the key to the most advanced logic and memory chips being produced for all kinds of electronic appliances. The HFP process is being applied to produce perfect wafer surfaces in a nanometer scale by removing haze, micro scratches and smallest particles. PETER WOLTERS has been the first company worldwide supplying turn key solutions for wafer manufacturing. The newest PETER WOLTERS CMP-tool, the HFP 300, features the most flexible process with different carrier technologies without compromising wafer geometry for haze removal. Highest throughput, attractive costs of invest and best cost-performance ratio with outstanding quality result in a significant reduction of Cost of Ownership. The future of MEMS (Micro Electro Mechanical Systems) technology enables remote miniature pressure sensors, gyros or biological/medical devices and also depend on advanced CMP processes. The market needs rigid, highly reliable and very flexible systems to cover the demands of MEMS fabrication. Here PETER WOLTERS provides the CMP-cluster PM 200 which delivers an outstanding flexibility and repeatability to developer and manufacturer of MEMS application. With its more than 30 years tradition supplying the semiconductor market, PETER WOLTERS is the worldwide market leader for 300 mm double-side polishing of silicon wafers. With its 3rd generation 300 mm Prime Wafer Polisher, the AC 2000-P2, PETER WOLTERS is again setting a new benchmark in quality, efficiency and low cost of ownership. In-house developed world leading Automations are also available for all systems. We use our years of experiences in lapping and polishing in the nano-range and innovative methods to develop promising solutions for the future. PETER WOLTERS products will enable a considerable reduction of costs in the handling of different semiconductor materials and the adherence to future design rules. The demands for strict “costs of ownership”-targets for the production process only serve to spur us on. Process automation, wafer tracking and the integration of our machines into SEMI-standards (GEM/SECS) are logical conclusions for Peter Wolters.
It is our aim from our position in the market to deliver individual solutions to our customers. Based on decades of know-how, applied by our highly qualified staff, we have made major advancements in the field of micro machining. The machines as well as the machining technologies are continuously improved and optimised to meet the customers’ needs. Research and development therefore have a high priority in our company. Close contacts are also maintained with scientific institutes and we are currently co-operating in various research projects.
PETER WOLTERS offers a complete customer service ‑ from initial application evaluation, process development, equipment specification, training of operating personnel ‑ through to technology transfer and start up.
